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Keywords: micromachining
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Journal Articles
Journal:
Journal of Vibration and Acoustics
Publisher: ASME
Article Type: Technical Papers
J. Vib. Acoust. October 2002, 124(4): 612–616.
Published Online: September 20, 2002
...Yi-Chu Hsu, Graduate Student; I. Y. Shen, Associate Professor This paper presents a bulk micromachining process to fabricate micro-constrained layer treatments (MCLT) on a microstructure to increase its damping, and demonstrates the damping improvement through calibrated experiments. MCLT consists...
