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Journal Articles

A FeCrAl-Al 2 O 3 Composite Produced Via Laser Powder Bed Fusion of a Mixed Powder for Porous Catalyst Scaffolds

Kwangtae Son, Hsin-Mei Kao, Patrick McNeff, Seongun Yang, Nahal Ghanadi, Somayeh Pasebani, Chi-hung Chang, Brian K. Paul
Journal: Journal of Micro and Nano Science and Engineering
Publisher: ASME
Article Type: Technical Briefs
J. Micro Nano Sci. Eng. June 2024, 12(2): 024501.
Paper No: JMNM-24-1009
https://doi.org/10.1115/1.4066114
Published Online: October 9, 2024
View Article titled, A FeCrAl-Al 2 O 3 Composite Produced Via Laser Powder Bed Fusion of a Mixed Powder for Porous Catalyst Scaffolds
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Topics: Catalysts, Composite materials, Lasers, Etching
Journal Articles

Scalable Au Metal-Assisted Chemical Etch Nanopatterning Using Enhanced Metal Break Techniques

Mark Hrdy, Akhila Mallavarapu, Mariana Castañeda, Paras Ajay, S. V. Sreenivasan
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. March 2023, 11(1): 011005.
Paper No: JMNM-23-1037
https://doi.org/10.1115/1.4064611
Published Online: February 15, 2024
View Article titled, Scalable Au Metal-Assisted Chemical Etch Nanopatterning Using Enhanced Metal Break Techniques
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Topics: Metals, Etching
Journal Articles

Simultaneous Micro- and Nanoscale Silicon Fabrication by Metal-Assisted Chemical Etch

Raul M. Lema Galindo, Paras Ajay, S. V. Sreenivasan
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. September 2022, 10(3): 031001.
Paper No: JMNM-22-1035
https://doi.org/10.1115/1.4062167
Published Online: April 3, 2023
View Article titled, Simultaneous Micro- and Nanoscale Silicon Fabrication by Metal-Assisted Chemical Etch
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Topics: Catalysts, Etching, Metals, Silicon, Nanoscale phenomena
Includes: Supplementary data
Journal Articles

Metal Assisted Chemical Etch of Polycrystalline Silicon

Crystal Barrera, Paras Ajay, Akhila Mallavarapu, Mark Hrdy, S. V. Sreenivasan
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. June 2022, 10(2): 021002.
Paper No: JMNM-22-1020
https://doi.org/10.1115/1.4055401
Published Online: September 27, 2022
View Article titled, Metal Assisted Chemical Etch of Polycrystalline Silicon
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Topics: Polysilicon, Metals, Columns (Structural), Etching, Silicon
Journal Articles

Spectral Imaging and Computer Vision for High-Throughput Defect Detection and Root-Cause Analysis of Silicon Nanopillar Arrays

Brian Gawlik, Ariel R. Barr, Akhila Mallavarapu, Edward T. Yu, S. V. Sreenivasan
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. March 2021, 9(1): 010904.
Paper No: JMNM-20-1008
https://doi.org/10.1115/1.4049959
Published Online: February 26, 2021
View Article titled, Spectral Imaging and Computer Vision for High-Throughput Defect Detection and Root-Cause Analysis of Silicon Nanopillar Arrays
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Topics: Computers, Delays, Etching, Flaw detection, Glass, Imaging, Manufacturing, Particulate matter, Root cause analysis, Semiconductor wafers
Journal Articles

Fabrication of Six Degrees-of-Freedom Hexflex Positioner With Integrated Strain Sensing Using Nonlithographically Based Microfabrication

Robert M. Panas, Martin L. Culpepper
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. March 2021, 9(1): 010902.
Paper No: JMNM-20-1013
https://doi.org/10.1115/1.4049123
Published Online: February 9, 2021
View Article titled, Fabrication of Six Degrees-of-Freedom Hexflex Positioner With Integrated Strain Sensing Using Nonlithographically Based Microfabrication
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Topics: Gages, Manufacturing, Microfabrication, Micromachining, Piezoresistors, Sensors, Silicon, Metals, Etching, Lasers
Journal Articles

A Study on the Damage Layer Removal of Single-Crystal Silicon Wafer After Atmospheric-Pressure Plasma Etching

Weijia Guo, Senthil Kumar Anantharajan, Xinquan Zhang, Hui Deng
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Technical Briefs
J. Micro Nano-Manuf. June 2020, 8(2): 024501.
Paper No: JMNM-19-1045
https://doi.org/10.1115/1.4046377
Published Online: March 27, 2020
View Article titled, A Study on the Damage Layer Removal of Single-Crystal Silicon Wafer After Atmospheric-Pressure Plasma Etching
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Topics: Atmospheric pressure, Crystals, Damage, Etching, Plasma etching, Plasmas (Ionized gases), Semiconductor wafers, Silicon, Surface roughness
Journal Articles

Vertical Deployment of Multilayered Metallic Microstructures With High Area-to-Mass Ratios by Thermal Actuation

Zhongjing Ren, Jianping Yuan, Xiaoyu Su, Hao Sun, Richard Galos, Yong Shi, Sundeep Mangla, Ming Lu, Fernando Camino
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. September 2019, 7(3): 031002.
Paper No: JMNM-19-1001
https://doi.org/10.1115/1.4043987
Published Online: July 25, 2019
View Article titled, Vertical Deployment of Multilayered Metallic Microstructures With High Area-to-Mass Ratios by Thermal Actuation
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Topics: Heating, Manufacturing, Metals, Nickel titanium alloys, Semiconductor wafers, Stiffness, Temperature, Vacuum, Solar energy, Etching
Journal Articles

Special Section on Recent Advancements in Micro- and Nano‐manufacturing From the WCMNM2018—Part 1

Irene Fassi, Lawrence Kulinsky, Martin Byung-Guk Jun
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Guest Editorial
J. Micro Nano-Manuf. March 2019, 7(1): 010301.
Paper No: JMNM-19-1015
https://doi.org/10.1115/1.4043692
Published Online: May 17, 2019
View Article titled, Special Section on Recent Advancements in Micro- and Nano‐manufacturing From the WCMNM2018—Part 1
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Topics: Micromanufacturing, Nanomanufacturing, Additive manufacturing, Lasers, Manufacturing, Micromilling, Vibration, Adhesion, Carbon, Cathode ray oscilloscopes
Journal Articles

Nanoparticle Emissions From Metal-Assisted Chemical Etching of Silicon Nanowires for Lithium Ion Batteries

Fenfen Wang, Xianfeng Gao, Lulu Ma, Chris Yuan
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. March 2019, 7(1): 011001.
Paper No: JMNM-18-1032
https://doi.org/10.1115/1.4042383
Published Online: April 15, 2019
View Article titled, Nanoparticle Emissions From Metal-Assisted Chemical Etching of Silicon Nanowires for Lithium Ion Batteries
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Topics: Emissions, Lithium-ion batteries, Nanoparticles, Nanowires, Particulate matter, Silicon, Metals, Water, Chemical etching, Etching
Journal Articles

Three-Dimensional Compatible Sacrificial Nanoimprint Lithography for Tuning the Wettability of Thermoplastic Materials

Molla Hasan, Imrhankhan Shajahan, Manesh Gopinadhan, Jittisa Ketkaew, Aaron Anesgart, Chloe Cho, Saransh Chopra, Michael Higgins, Saira Reyes, Jan Schroers, Chinedum O. Osuji, Jonathan P. Singer
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. December 2018, 6(4): 041003.
Paper No: JMNM-18-1027
https://doi.org/10.1115/1.4041532
Published Online: October 16, 2018
View Article titled, Three-Dimensional Compatible Sacrificial Nanoimprint Lithography for Tuning the Wettability of Thermoplastic Materials
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Topics: Aluminum, Lithography, Nanostructures , Surface roughness, Thermoplastic rubber, Wetting, Water, Elastomers, Manufacturing, Hydrophobicity
Journal Articles

Fabrication of Micro Diamond-Like Carbon-Nozzles by Plasma Oxidation Printing

Tatsuhiko Aizawa, Hiroshi Tamagaki, Kenji Wasa
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. June 2018, 6(2): 021007.
Paper No: JMNM-16-1070
https://doi.org/10.1115/1.4039358
Published Online: March 30, 2018
View Article titled, Fabrication of Micro Diamond-Like Carbon-Nozzles by Plasma Oxidation Printing
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Topics: Carbon, Diamond films, Diamonds, Nozzles, Oxidation, Plasmas (Ionized gases), Printing, Manufacturing, Micronozzles, Etching
Journal Articles

Achieving Ultra-Omniphilic Wettability on Copper Using a Facile, Scalable, Tuned Bulk Micromanufacturing Approach

Nicholas Clegg, Krishna Kota, Xin He, Sean Ross
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. September 2017, 5(3): 031003.
Paper No: JMNM-16-1041
https://doi.org/10.1115/1.4036446
Published Online: May 17, 2017
View Article titled, Achieving Ultra-Omniphilic Wettability on Copper Using a Facile, Scalable, Tuned Bulk Micromanufacturing Approach
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Topics: Copper, Water, Micromanufacturing, Surface roughness, Drops, Etching, Coatings, Polishing
Journal Articles

ArF Excimer Laser Micromachining of MEMS Materials: Characterization and Applications

Kewei Liu, Yoontae Kim, Hongseok (Moses) Noh
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. June 2014, 2(2): 021006.
Paper No: JMNM-13-1069
https://doi.org/10.1115/1.4027121
Published Online: April 11, 2014
View Article titled, ArF Excimer Laser Micromachining of MEMS Materials: Characterization and Applications
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Topics: Ablation (Vaporization technology), Etching, Excimer lasers, Fluence (Radiation measurement), Glass, Lasers, Microelectromechanical systems, Micromachining, Plasma desorption mass spectrometry
Journal Articles

Fabrication Technology of Low-Adhesive Superhydrophobic and Superamphiphobic Surfaces Based on Electrochemical Machining Method

Jinlong Song, Wenji Xu, Yao Lu, Limei Luo, Xin Liu, Zefei Wei
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. June 2013, 1(2): 021003.
Paper No: JMNM-12-1049
https://doi.org/10.1115/1.4024098
Published Online: April 22, 2013
View Article titled, Fabrication Technology of Low-Adhesive Superhydrophobic and Superamphiphobic Surfaces Based on Electrochemical Machining Method
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Topics: Adhesives, Aluminum, Etching, Magnesium alloys, Manufacturing, Steel, Surface roughness, Water, Machining