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Journal Articles

Design and Configuration of Folded Platonic Strapdowns of Biaxial MEMS Accelerometers

Xiaowei Shan, Jorge Angeles, James Richard Forbes
Journal: Journal of Mechanical Design
Publisher: ASME
Article Type: Design Innovation Paper
J. Mech. Des. February 2021, 143(2): 025001.
Paper No: MD-18-1793
https://doi.org/10.1115/1.4047720
Published Online: August 18, 2020
View Article titled, Design and Configuration of Folded Platonic Strapdowns of Biaxial MEMS Accelerometers
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Topics: Accelerometers, Design, Microelectromechanical systems
Journal Articles

Kinematic Synthesis of a D-Drive MEMS Device With Rigid-Body Replacement Method

Paolo Sanò, Matteo Verotti, Paolo Bosetti, Nicola P. Belfiore
Journal: Journal of Mechanical Design
Publisher: ASME
Article Type: Design Innovation Paper
J. Mech. Des. July 2018, 140(7): 075001.
Paper No: MD-17-1606
https://doi.org/10.1115/1.4039853
Published Online: April 25, 2018
View Article titled, Kinematic Synthesis of a D-Drive MEMS Device With Rigid-Body Replacement Method
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Topics: Design, Kinematics, Microelectromechanical systems, Simulation, Finite element analysis, Compliant mechanisms, Manufacturing, Displacement
Journal Articles

A Comprehensive Survey on Microgrippers Design: Operational Strategy

Alden Dochshanov, Matteo Verotti, Nicola P. Belfiore
Journal: Journal of Mechanical Design
Publisher: ASME
Article Type: Review Articles
J. Mech. Des. July 2017, 139(7): 070801.
Paper No: MD-16-1536
https://doi.org/10.1115/1.4036352
Published Online: May 10, 2017
View Article titled, A Comprehensive Survey on Microgrippers Design: Operational Strategy
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Topics: Actuators, Design, Displacement, Microelectromechanical systems, Sensors, Manufacturing, Manganese (Metal), Temperature
Journal Articles

A Comprehensive Survey on Microgrippers Design: Mechanical Structure

Matteo Verotti, Alden Dochshanov, Nicola P. Belfiore
Journal: Journal of Mechanical Design
Publisher: ASME
Article Type: Review Articles
J. Mech. Des. June 2017, 139(6): 060801.
Paper No: MD-16-1535
https://doi.org/10.1115/1.4036351
Published Online: May 3, 2017
View Article titled, A Comprehensive Survey on Microgrippers Design: Mechanical Structure
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Topics: Compliant mechanisms, Design, Geometry, Grippers, Kinematic chains, Mechanical structures, Microelectromechanical systems, Kinematics
Journal Articles

Compliance Synthesis of CSFH MEMS-Based Microgrippers

Matteo Verotti, Alden Dochshanov, Nicola P. Belfiore
Journal: Journal of Mechanical Design
Publisher: ASME
Article Type: Research-Article
J. Mech. Des. February 2017, 139(2): 022301.
Paper No: MD-16-1313
https://doi.org/10.1115/1.4035053
Published Online: November 14, 2016
View Article titled, Compliance Synthesis of CSFH MEMS-Based Microgrippers
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Topics: Compliant mechanisms, Design, Microelectromechanical systems, Simulation, Stiffness, Finite element analysis, Anisotropy, Silicon
Journal Articles

MEMS-Based Conjugate Surfaces Flexure Hinge

Matteo Verotti, Rocco Crescenzi, Marco Balucani, Nicola P. Belfiore
Journal: Journal of Mechanical Design
Publisher: ASME
Article Type: Research-Article
J. Mech. Des. January 2015, 137(1): 012301.
Paper No: MD-14-1242
https://doi.org/10.1115/1.4028791
Published Online: January 1, 2015
View Article titled, MEMS-Based Conjugate Surfaces Flexure Hinge
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Topics: Bending (Stress), Compliant mechanisms, Hinges, Microelectromechanical systems, Stress, Silicon, Engineering prototypes, Finite element analysis
Journal Articles

Dynamic Electromechanical Field Concentrations Near Electrodes in Piezoelectric Thick Films for the Design of MEMS Mirrors

Yasuhide Shindo, Fumio Narita, Koji Sato
Journal: Journal of Mechanical Design
Publisher: ASME
Article Type: Research Papers
J. Mech. Des. May 2012, 134(5): 051005.
https://doi.org/10.1115/1.4006265
Published Online: April 25, 2012
View Article titled, Dynamic Electromechanical Field Concentrations Near Electrodes in Piezoelectric Thick Films for the Design of MEMS Mirrors
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Topics: Design, Electric fields, Electrodes, Microelectromechanical systems, Mirrors, Thick films, Resonance, Finite element analysis
Journal Articles

Mechanically Amplified 3-DoF Nonresonant Microelectromechanical Systems Gyroscope Fabricated in Low Cost MetalMUMPs Process

Rana I. Shakoor, Shafaat A. Bazaz, M. Mubasher Saleem
Journal: Journal of Mechanical Design
Publisher: ASME
Article Type: Research Papers
J. Mech. Des. November 2011, 133(11): 111002.
https://doi.org/10.1115/1.4004790
Published Online: November 11, 2011
View Article titled, Mechanically Amplified 3-DoF Nonresonant Microelectromechanical Systems Gyroscope Fabricated in Low Cost MetalMUMPs Process
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Topics: Damping, Design, Design engineering, Engineering prototypes, Frequency response, Manufacturing, Microelectromechanical systems, Microgyroscopes, Micromachining, Resonance
Journal Articles

Control Proxy Functions for Sequential Design and Control Optimization

Diane L. Peters, P. Y. Papalambros, A. G. Ulsoy
Journal: Journal of Mechanical Design
Publisher: ASME
Article Type: Research Papers
J. Mech. Des. September 2011, 133(9): 091007.
https://doi.org/10.1115/1.4004792
Published Online: September 15, 2011
View Article titled, Control Proxy Functions for Sequential Design and Control Optimization
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Topics: Actuators, Control equipment, Design, Optimization, Theorems (Mathematics), Microelectromechanical systems
Journal Articles

Active Vibration Control and Isolation for Micromachined Devices

Seong Jin Kim, Robert Dean, George Flowers, Chen Chen
Journal: Journal of Mechanical Design
Publisher: ASME
Article Type: Research Papers
J. Mech. Des. September 2009, 131(9): 091002.
https://doi.org/10.1115/1.3159042
Published Online: August 17, 2009
View Article titled, Active Vibration Control and Isolation for Micromachined Devices
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Topics: Damping, Electrodes, Electrostatic actuators, Feedback, Filters, Microelectromechanical systems, Micromachining, Sensors, Vibration isolation, Vibration isolators
Journal Articles

Reliability Based Design Optimization of MEMS Considering Pull-In

Michael Raulli, Kurt Maute
Journal: Journal of Mechanical Design
Publisher: ASME
Article Type: Research Papers
J. Mech. Des. June 2009, 131(6): 061014.
https://doi.org/10.1115/1.3116262
Published Online: May 21, 2009
View Article titled, Reliability Based Design Optimization of MEMS Considering Pull-In
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Topics: Design, Eigenvalues, Event history analysis, Microelectromechanical systems, Mirrors, Optimization, Reliability, Reliability-based optimization
Journal Articles

Design of Electrothermally Compliant MEMS With Hexagonal Cells Using Local Temperature and Stress Constraints

Rajat Saxena, Anupam Saxena
Journal: Journal of Mechanical Design
Publisher: ASME
Article Type: Research Papers
J. Mech. Des. May 2009, 131(5): 051006.
https://doi.org/10.1115/1.3087544
Published Online: April 6, 2009
View Article titled, Design of Electrothermally Compliant MEMS With Hexagonal Cells Using Local Temperature and Stress Constraints
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Topics: Design, Stress, Temperature, Topology, Optimization, Displacement, Microelectromechanical systems
Journal Articles

Architectures of Translational Parallel Mechanism for MEMS Fabrication

Hagay Bamberger, Alon Wolf, Moshe Shoham
Journal: Journal of Mechanical Design
Publisher: ASME
Article Type: Technical Briefs
J. Mech. Des. August 2008, 130(8): 084502.
https://doi.org/10.1115/1.2936933
Published Online: July 11, 2008
View Article titled, Architectures of Translational Parallel Mechanism for MEMS Fabrication
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Topics: Actuators, Architecture, Design, Jacobian matrices, Kinematics, Manufacturing, Microelectromechanical systems, Parallel mechanisms
Journal Articles

Probabilistic Analysis of MEMS Asymmetric Gear Tooth

Fatih Karpat, Stephen Ekwaro-Osire, Morshed P. H. Khandaker
Journal: Journal of Mechanical Design
Publisher: ASME
Article Type: Research Papers
J. Mech. Des. April 2008, 130(4): 042306.
https://doi.org/10.1115/1.2885189
Published Online: March 19, 2008
View Article titled, Probabilistic Analysis of MEMS Asymmetric Gear Tooth
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Topics: Failure, Gear teeth, Gears, Microelectromechanical systems, Stress, Reliability, Pressure, Probability, Vibration
Journal Articles

Components, Building Blocks, and Demonstrations of Spherical Mechanisms in Microelectromechanical Systems

Craig P. Lusk, Larry L. Howell
Journal: Journal of Mechanical Design
Publisher: ASME
Article Type: Technical Briefs
J. Mech. Des. March 2008, 130(3): 034503.
https://doi.org/10.1115/1.2829914
Published Online: February 5, 2008
View Article titled, Components, Building Blocks, and Demonstrations of Spherical Mechanisms in Microelectromechanical Systems
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Topics: Blocks (Building materials), Microelectromechanical systems, Micromechanical devices, Design, Manufacturing, Kinematics
Journal Articles

Design Methodology for Microelectromechanical Systems. Case Study: Torsional Scanner Mirror

Faik Can Meral, Ipek Basdogan
Journal: Journal of Mechanical Design
Publisher: ASME
Article Type: Research Papers
J. Mech. Des. October 2007, 129(10): 1023–1030.
https://doi.org/10.1115/1.2756087
Published Online: December 15, 2006
View Article titled, Design Methodology for Microelectromechanical Systems. Case Study: Torsional Scanner Mirror
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Topics: Design, Microelectromechanical systems, Mirrors, Sensitivity analysis, Torque, Transfer functions, Finite element model, Eigenvalues, Modal analysis, Design methodology
Journal Articles

Mechanical Design of Compliant Microsystems—A Perspective and Prospects

G. K. Ananthasuresh, Larry L. Howell
Journal: Journal of Mechanical Design
Publisher: ASME
Article Type: Introduction
J. Mech. Des. July 2005, 127(4): 736–738.
https://doi.org/10.1115/1.1900150
Published Online: February 14, 2005
View Article titled, Mechanical Design of Compliant Microsystems—A Perspective and Prospects
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Topics: Design, Design engineering, Microelectromechanical systems, Micromechanical devices, Micromachining
Journal Articles

Design of Two-Link, In-Plane, Bistable Compliant Micro-Mechanisms

B. D. Jensen, L. L. Howell, L. G. Salmon
Journal: Journal of Mechanical Design
Publisher: ASME
Article Type: Research Papers
J. Mech. Des. September 1999, 121(3): 416–423.
https://doi.org/10.1115/1.2829477
Published Online: September 1, 1999
View Article titled, Design of Two-Link, In-Plane, Bistable Compliant Micro-Mechanisms
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Topics: Design, Micromechanical devices, Deflection, Energy efficiency, Energy storage, Manufacturing, Microelectromechanical systems, Polysilicon
Journal Articles

Design and Fabrication of Microelectromechanical Systems

S. Kota, G. K. Ananthasuresh, S. B. Crary, K. D. Wise
Journal: Journal of Mechanical Design
Publisher: ASME
Article Type: Research Papers
J. Mech. Des. December 1994, 116(4): 1081–1088.
https://doi.org/10.1115/1.2919490
Published Online: December 1, 1994
View Article titled, Design and Fabrication of Microelectromechanical Systems
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Topics: Design, Manufacturing, Microelectromechanical systems, Micromachining, Micromechanical devices, Sensors, Boron, Circuits, Compliant mechanisms, Dimensions