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Keywords: rf MEMS
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Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Eng. Mater. Technol. January 2009, 131(1): 011002.
Published Online: December 15, 2008
... to dislocation densities is used in a specialized finite-element modeling framework. The asperity model and the loading conditions are based on realistic service conditions consistent with rf MEMS with metallic normal contacts. The evolving microstructure, stress fields, contact width, hardness, residual effects...
