... finite element analysis forming processes laser beam applications microfabrication plastic flow scanning electron microscopy shock wave effects work hardening With the increasing application of micro-electro-mechanical systems (MEMS) in industry, its reliability and robustness calls...

... data in many aspects under a variety of typical LSP conditions, and good agreements are obtained. 30 11 2005 29 06 2006 internal stresses laser materials processing shot peening shock wave effects fatigue corrosion finite element analysis plastic deformation electric breakdown...

... stress analysis stress measurement shock wave effects More recently, reliability and failure problems in MEMS have attracted increasing attention 1 2 . While the dominant material in MEMS is silicon, metal and metallic thin film structures are often indispensable. Non-metal plates suffer from...

... in the JOURNAL OF MANUFACTURING SCIENCE AND ENGINEERING . Manuscript received Nov. 2000; Revised July 2001. Associate Editor: S. G. Kapoor. 01 Nov 2000 01 July 2001 29 04 2002 laser materials processing shock wave effects copper high-pressure effects laser beam effects plastic...

... Nov 1999 laser beam machining jets turbulence nozzles supersonic flow shock wave effects cutting The assist gas plays an important role in laser machining. It provides a mechanical force to eject the melt from the cut zone and cools the cut zone by forced convection. Inefficient...