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Keywords: semiconductor growth
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Journal Articles
Publisher: ASME
Article Type: Special Issue On Nanomanufacturing
J. Manuf. Sci. Eng. June 2010, 132(3): 030918.
Published Online: June 14, 2010
... Characterization of Atomic Layer Deposition ,” Proceedings of the IEEE International Symposium on Electronics and the Environment . 15 06 2009 16 04 2010 14 06 2010 14 06 2010 atomic layer deposition energy consumption integrated circuit manufacture semiconductor growth...
