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Keywords: material flow analysis
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Journal Articles
Publisher: ASME
Article Type: Special Issue On Nanomanufacturing
J. Manuf. Sci. Eng. June 2010, 132(3): 030918.
Published Online: June 14, 2010
... Material flow analysis is conducted on the ALD process at three precursor supply patterns. Material utilization efficiencies of both precursor materials are obtained for each supply pattern, and material flows of the precursors in the whole ALD system are quantitatively investigated. As assessed...
