... Characterization of Atomic Layer Deposition ,” Proceedings of the IEEE International Symposium on Electronics and the Environment . 15 06 2009 16 04 2010 14 06 2010 14 06 2010 atomic layer deposition energy consumption integrated circuit manufacture semiconductor growth...

.... 0021-8979 10.1063/1.321567 , 46 ( 12 ), pp. 5110 – 5113 . 10 03 2006 18 09 2006 wear diamond silicon elemental semiconductors ductility cutting tools integrated circuit manufacture molecular dynamics method cutting microgroove wear nanogroove wear nanoscale...

... and deposition in CC 06 06 2003 16 08 2006 condition monitoring process monitoring extrusion layered manufacturing integrated circuit manufacture prosthetics cost reduction failure analysis quality management The current thrust of industries towards mass customization...

.... This is also true in the silicon wafer manufacturing industry. To carry out these practical applications without more detailed modeling, some radically new approaches are needed. fuzzy adaptive network soft-pad grinding silicon wafers fuzzy neural nets grinding integrated circuit manufacture...

... Editor: K. Danai. 17 December 2002 07 February 2004 21 03 2005 object recognition integrated circuit manufacture industrial manipulators end effectors optical sensors position control fault diagnosis electronics industry Manufacturing Automation Robotics...

... AND ENGINEERING . Manuscript received Jan. 2002; Revised Nov. 2002. Associate Editor: Y. L. Yao. 01 Jan 2002 01 Nov 2002 23 07 2003 rapid thermal processing integrated circuit manufacture thermal stresses stress control finite difference methods Rapid thermal processing (RTP...