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Keywords: image scanners
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Journal Articles
Publisher: ASME
Article Type: Special Issue On Nanomanufacturing
J. Manuf. Sci. Eng. June 2010, 132(3): 030903.
Published Online: May 13, 2010
..., on atomic force microscopy (AFM) that has been recognized as a fundamental tool for dimensional measurements in micro/nanotechnology ( 3 4 5 6 7 8 9 ). atomic force microscopy dimensional metrology micromanufacturing atomic force microscopy creep dimensions hysteresis image...
