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Keywords: dimensions
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Journal Articles
Publisher: ASME
Article Type: Technical Briefs
J. Manuf. Sci. Eng. March 2022, 144(3): 034501.
Paper No: MANU-21-1208
Published Online: August 24, 2021
... parameters, workpiece dimensions, and the WSH nature for the first time. The experiments are carried out on a specially designed bench. It is established that WSH occurs not only from the front side (along which the processing was performed), but also from the backside, while leaving the original material...
Journal Articles
Publisher: ASME
Article Type: Special Issue On Nanomanufacturing
J. Manuf. Sci. Eng. June 2010, 132(3): 030903.
Published Online: May 13, 2010
... . 10.1016/j.cirp.2006.10.005 Dixson , R. G. , Allen , R. A. , Guthrie , W. F. , and Cresswell , M. W. , 2005 , “ Traceable Calibration of Critical-Dimension Atomic Force Microscope Linewidth Measurements With Nanometer Uncertainty ,” J. Vac. Sci. Technol. B 1071-1023 , 23 ( 6...
