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Journal Articles

Acquired angle error correction based on variation of an angle detection signal intensity in rotary encoders

Akihiko Sato, Yashuhiro Kakinuma

Publisher: ASME

J. Manuf. Sci. Eng.

Paper No: MANU-24-1422

https://doi.org/10.1115/1.4066668

Published Online: September 24, 2024

View Article titled, Acquired angle error correction based on variation of an angle detection signal intensity in rotary encoders

Topics: Errors, Sensors, Shaft angle encoders, Signals, Machinery, Accuracy and precision, Deformation, Machining, Metrology, Rotation

Journal Articles

Concept of error compensation for non-orthogonality in two-axis displacement measurement system utilizing single grating scale and Littrow configuration

Masaki Michihata, Souki Fujimura, Shuzo Masui, Satoru Takahashi

Publisher: ASME

J. Manuf. Sci. Eng.

Paper No: MANU-24-1366

https://doi.org/10.1115/1.4066035

Published Online: July 19, 2024

View Article titled, Concept of error compensation for non-orthogonality in two-axis displacement measurement system utilizing single grating scale and Littrow configuration

Topics: Diffraction gratings, Displacement measurement, Error compensation, Displacement, Interferometers, Measurement systems, Inspection, Lasers, Metrology, Quality control

Journal Articles

Wafer Edge Metrology and Inspection Technique Using Curved-Edge Diffractive Fringe Pattern Analysis

Kuan Lu, Zhikun Wang, Heebum Chun, ChaBum Lee

Publisher: ASME

J. Manuf. Sci. Eng. July 2024, 146(7): 070908.

Paper No: MANU-23-1366

https://doi.org/10.1115/1.4065639

Published Online: June 10, 2024

View Article titled, Wafer Edge Metrology and Inspection Technique Using Curved-Edge Diffractive Fringe Pattern Analysis

Topics: Diffraction patterns, Imaging, Inspection, Metrology, Semiconductor wafers, Feature extraction, Particulate matter

Journal Articles

Hole Edge Metrology and Inspection by Edge Diffractometry

Kuan Lu, ChaBum Lee

Publisher: ASME

J. Manuf. Sci. Eng. July 2024, 146(7): 070905.

Paper No: MANU-24-1019

https://doi.org/10.1115/1.4065314

Published Online: April 29, 2024

View Article titled, Hole Edge Metrology and Inspection by Edge Diffractometry

Topics: Diffraction, Diffraction patterns, Inspection, Metrology, Surface roughness, Geometry

Journal Articles

Optical Metrology of Critical Dimensions in Large-Area Nanostructure Arrays With Complex Patterns

Ramin Sabbagh, Alec Stothert, S. V. Sreenivasan, Dragan Djurdjanovic

Publisher: ASME

J. Manuf. Sci. Eng. June 2023, 145(6): 061010.

Paper No: MANU-22-1619

https://doi.org/10.1115/1.4056923

Published Online: March 14, 2023

View Article titled, Optical Metrology of Critical Dimensions in Large-Area Nanostructure Arrays With Complex Patterns

Topics: Dimensions, Gages, Inspection, Inverse problems, Metrology, Reflectance, Semiconductor wafers, Spectra (Spectroscopy), Optimization, Simulation

Journal Articles

Precision Silicon Exfoliation Tool Design

Martin J. Ward, Dipankar Behera, Michael A. Cullinan

Publisher: ASME

J. Manuf. Sci. Eng. February 2023, 145(2): 024501.

Paper No: MANU-22-1105

https://doi.org/10.1115/1.4055320

Published Online: September 27, 2022

View Article titled, Precision Silicon Exfoliation Tool Design

Topics: Design, Metrology, Semiconductor wafers, Silicon, Stress, Surface roughness, Errors, Nickel, Film thickness, Engineering prototypes

Journal Articles

High Definition Metrology-Based Quality Improvement of Surface Texture in Face Milling of Workpieces With Discontinuous Surfaces

Guilong Li, Shichang Du, Bo Wang, Jun Lv, Yafei Deng

Publisher: ASME

J. Manuf. Sci. Eng. March 2022, 144(3): 031001.

Paper No: MANU-20-1734

https://doi.org/10.1115/1.4051883

Published Online: August 5, 2021

View Article titled, High Definition Metrology-Based Quality Improvement of Surface Texture in Face Milling of Workpieces With Discontinuous Surfaces

Topics: Cutting, Milling, Surface texture, Optimization, Wear, Metrology, Modeling

Journal Articles

Cosine Error-Free Metrology Tool Path Planning for Thickness Profile Measurements

Xiangyu Guo, ChaBum Lee

Publisher: ASME

J. Manuf. Sci. Eng. April 2021, 143(4): 041006.

Paper No: MANU-20-1164

https://doi.org/10.1115/1.4048433

Published Online: October 27, 2020

View Article titled, Cosine Error-Free Metrology Tool Path Planning for Thickness Profile Measurements

Topics: Errors, Metrology, Path planning, Sensors, Uncertainty

Journal Articles

Micro/Meso-Scale Mechanical Machining 2020: A Two-Decade State-of-the-Field Review

Johnson Samuel, Martin B. G. Jun, O. Burak Ozdoganlar, Andrew Honegger, Mike Vogler, Shiv G. Kapoor

Publisher: ASME

J. Manuf. Sci. Eng. November 2020, 142(11): 110809.

Paper No: MANU-20-1013

https://doi.org/10.1115/1.4047621

Published Online: September 8, 2020

View Article titled, Micro/Meso-Scale Mechanical Machining 2020: A Two-Decade State-of-the-Field Review

Topics: Calibration, Cutting, Design, Dynamics (Mechanics), Machine tools, Machining, Modeling, Manufacturing, Cooling, Cutting tools

Journal Articles

A New Surface Topography-Based Method to Quantify Axial Error of High Speed Milling Cutters

Wanqun Chen, Lei Lu, Wenkun Xie, Dehong Huo, Kai Yang

Publisher: ASME

J. Manuf. Sci. Eng. November 2018, 140(11): 111014.

Paper No: MANU-18-1190

https://doi.org/10.1115/1.4041180

Published Online: August 31, 2018

View Article titled, A New Surface Topography-Based Method to Quantify Axial Error of High Speed Milling Cutters

Topics: Errors, Machining, Metrology, Milling, Rotation, Cutting tools, Signals, Cutting, Micromilling

Journal Articles

Virtual Model of Gear Shaping—Part II: Elastic Deformations and Virtual Gear Metrology

Andrew Katz, Kaan Erkorkmaz, Fathy Ismail

Publisher: ASME

J. Manuf. Sci. Eng. July 2018, 140(7): 071008.

Paper No: MANU-17-1484

https://doi.org/10.1115/1.4039651

Published Online: April 16, 2018

View Article titled, Virtual Model of Gear Shaping—Part II: Elastic Deformations and Virtual Gear Metrology

Topics: Cutting, Deflection, Gears, Metrology, Errors, Stiffness, Deformation, Machining

Journal Articles

Evaluation of Scanning Parameters Based on Image Entropy for Dimensional Computed Tomography Metrology

Lin Xue, Hiromasa Suzuki

Publisher: ASME

J. Manuf. Sci. Eng. July 2017, 139(7): 071001.

Paper No: MANU-16-1166

https://doi.org/10.1115/1.4035676

Published Online: March 6, 2017

View Article titled, Evaluation of Scanning Parameters Based on Image Entropy for Dimensional Computed Tomography Metrology

Topics: Entropy, Errors, Metrology

Journal Articles

Aesthetics and Gloss of Ground Surfaces: A Review on Measurement and Generation

Barbara Linke, Jayanti Das

Publisher: ASME

J. Manuf. Sci. Eng. June 2016, 138(6): 064501.

Paper No: MANU-15-1481

https://doi.org/10.1115/1.4032587

Published Online: March 9, 2016

View Article titled, Aesthetics and Gloss of Ground Surfaces: A Review on Measurement and Generation

Topics: Computers, Grinding, Manufacturing, Metal surfaces, Metrology, Modeling, Reflection, Surface roughness, Physics, Refraction

Journal Articles

Assessment of Dimensional Integrity and Spatial Defect Localization in Additive Manufacturing Using Spectral Graph Theory

Prahalad K. Rao, Zhenyu Kong, Chad E. Duty, Rachel J. Smith, Vlastimil Kunc, Lonnie J. Love

Publisher: ASME

J. Manuf. Sci. Eng. May 2016, 138(5): 051007.

Paper No: MANU-15-1093

https://doi.org/10.1115/1.4031574

Published Online: November 19, 2015

View Article titled, Assessment of Dimensional Integrity and Spatial Defect Localization in Additive Manufacturing Using Spectral Graph Theory

Topics: Additive manufacturing, Dimensions, Errors, Geometry, Lasers, Manufacturing, Quality control, Mining, Metrology, Computer-aided design

Journal Articles

A Selective Multiclass Support Vector Machine Ensemble Classifier for Engineering Surface Classification Using High Definition Metrology

Shichang Du, Changping Liu, Lifeng Xi

Publisher: ASME

J. Manuf. Sci. Eng. February 2015, 137(1): 011003.

Paper No: MANU-13-1247

https://doi.org/10.1115/1.4028165

Published Online: February 1, 2015

View Article titled, A Selective Multiclass Support Vector Machine Ensemble Classifier for Engineering Surface Classification Using High Definition Metrology

Topics: Feature extraction, Sensitivity analysis, Support vector machines, Wavelets, Algorithms, Metrology

Journal Articles

Surface Topography of Additive Manufacturing Parts Using a Finite Difference Approach

Saeed Jamiolahmadi, Ahmad Barari

Publisher: ASME

J. Manuf. Sci. Eng. December 2014, 136(6): 061009.

Paper No: MANU-14-1178

https://doi.org/10.1115/1.4028585

Published Online: October 24, 2014

View Article titled, Surface Topography of Additive Manufacturing Parts Using a Finite Difference Approach

Topics: Additive manufacturing, Inspection, Manufacturing, Performance evaluation, Surface roughness, Finishes, Metrology

Journal Articles

On the Development of an Experimental Testing Platform for the Vortex Machining Process

Stephen C. Howard, Jacob W. Chesna, Stuart T. Smith, Brigid A. Mullany

Publisher: ASME

J. Manuf. Sci. Eng. October 2013, 135(5): 051005.

Paper No: MANU-13-1013

https://doi.org/10.1115/1.4025011

Published Online: September 11, 2013

View Article titled, On the Development of an Experimental Testing Platform for the Vortex Machining Process

Topics: Machining, Probes, Slurries, Testing, Vortices, Metrology, Sensors

Journal Articles

Characterization of Cutting Force Induced Surface Shape Variation in Face Milling Using High-Definition Metrology

Hai Trong Nguyen, Hui Wang, S. Jack Hu

Publisher: ASME

J. Manuf. Sci. Eng. August 2013, 135(4): 041014.

Paper No: MANU-12-1208

https://doi.org/10.1115/1.4024290

Published Online: July 17, 2013

View Article titled, Characterization of Cutting Force Induced Surface Shape Variation in Face Milling Using High-Definition Metrology

Topics: Cutting, Shapes, Milling, Metrology, Machining

Journal Articles

Guest Editorial

Kevin Lyons, Ajay Malshe, Kamlakar Rajurkar, Curtis Taylor

Publisher: ASME

J. Manuf. Sci. Eng. June 2010, 132(3): 030301.

https://doi.org/10.1115/1.3463643

Published Online: June 24, 2010

View Article titled, Guest Editorial

Topics: Biomedicine, Bridges (Structures), Coatings, Defense industry, Design, Drugs, Electronics, Engines, Industrial research, Inventions

Journal Articles

Precision Spindle Metrology

SHINJI SHIMIZU

Publisher: ASME

J. Manuf. Sci. Eng. June 2008, 130(3): 036501.

https://doi.org/10.1115/1.2944274

Published Online: June 4, 2008

View Article titled, Precision Spindle Metrology

Topics: Metrology

Journal citation

NARROW

Manuscript

Acquired angle error correction based on variation of an angle detection signal intensity in rotary encoders

Concept of error compensation for non-orthogonality in two-axis displacement measurement system utilizing single grating scale and Littrow configuration

Wafer Edge Metrology and Inspection Technique Using Curved-Edge Diffractive Fringe Pattern Analysis

Hole Edge Metrology and Inspection by Edge Diffractometry

Optical Metrology of Critical Dimensions in Large-Area Nanostructure Arrays With Complex Patterns

Precision Silicon Exfoliation Tool Design

High Definition Metrology-Based Quality Improvement of Surface Texture in Face Milling of Workpieces With Discontinuous Surfaces

Cosine Error-Free Metrology Tool Path Planning for Thickness Profile Measurements

Micro/Meso-Scale Mechanical Machining 2020: A Two-Decade State-of-the-Field Review

A New Surface Topography-Based Method to Quantify Axial Error of High Speed Milling Cutters

Virtual Model of Gear Shaping—Part II: Elastic Deformations and Virtual Gear Metrology

Evaluation of Scanning Parameters Based on Image Entropy for Dimensional Computed Tomography Metrology

Aesthetics and Gloss of Ground Surfaces: A Review on Measurement and Generation

Assessment of Dimensional Integrity and Spatial Defect Localization in Additive Manufacturing Using Spectral Graph Theory

A Selective Multiclass Support Vector Machine Ensemble Classifier for Engineering Surface Classification Using High Definition Metrology

Surface Topography of Additive Manufacturing Parts Using a Finite Difference Approach

On the Development of an Experimental Testing Platform for the Vortex Machining Process

Characterization of Cutting Force Induced Surface Shape Variation in Face Milling Using High-Definition Metrology

Guest Editorial

Precision Spindle Metrology

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