The development of manufacturing tools and processes capable of precisely positioning and manipulating nanoscale components and materials is still in its embryonic stage. Microactuators are emerging as important tools capable of precisely positioning and manipulating nanoscale components and materials. This paper provides a summary of the state-of-the-art in the design, fabrication, and application of microactuators for nanoscale manufacturing and assembly. Key characteristics and design models of electrothermal and electrostatic microactuators are described and compared. Specific design requirements for their functionality at the nanoscale are discussed. The results demonstrate the limitations of existing microactuator designs and key challenges associated with their design, modeling, and performance characterization for nanoscale positioning, assembly, and manipulation.
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e-mail: curtis.taylor@ufl.edu
e-mail: kam@unr.edu
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June 2010
Special Issue On Nanomanufacturing
Emerging Challenges of Microactuators for Nanoscale Positioning, Assembly, and Manipulation
Bijoyraj Sahu,
Bijoyraj Sahu
Department of Mechanical and Aerospace Engineering,
University of Florida
, Gainesville, FL 32611-6300
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Curtis R. Taylor,
Curtis R. Taylor
Department of Mechanical and Aerospace Engineering,
e-mail: curtis.taylor@ufl.edu
University of Florida
, Gainesville, FL 32611-6300
Search for other works by this author on:
Kam K. Leang
Kam K. Leang
Department of Mechanical Engineering,
e-mail: kam@unr.edu
University of Nevada-Reno
, Reno, NV 89557-0312
Search for other works by this author on:
Bijoyraj Sahu
Department of Mechanical and Aerospace Engineering,
University of Florida
, Gainesville, FL 32611-6300
Curtis R. Taylor
Department of Mechanical and Aerospace Engineering,
University of Florida
, Gainesville, FL 32611-6300e-mail: curtis.taylor@ufl.edu
Kam K. Leang
Department of Mechanical Engineering,
University of Nevada-Reno
, Reno, NV 89557-0312e-mail: kam@unr.edu
J. Manuf. Sci. Eng. Jun 2010, 132(3): 030917 (16 pages)
Published Online: June 14, 2010
Article history
Received:
August 31, 2009
Revised:
April 12, 2010
Online:
June 14, 2010
Published:
June 14, 2010
Citation
Sahu, B., Taylor, C. R., and Leang, K. K. (June 14, 2010). "Emerging Challenges of Microactuators for Nanoscale Positioning, Assembly, and Manipulation." ASME. J. Manuf. Sci. Eng. June 2010; 132(3): 030917. https://doi.org/10.1115/1.4001662
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