Skip Nav Destination
Close Modal
Update search
Filter
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- ISBN-10
- ISSN
- EISSN
- Issue
- Journal Volume Number
- References
- Conference Volume Title
- Paper No
Filter
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- ISBN-10
- ISSN
- EISSN
- Issue
- Journal Volume Number
- References
- Conference Volume Title
- Paper No
Filter
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- ISBN-10
- ISSN
- EISSN
- Issue
- Journal Volume Number
- References
- Conference Volume Title
- Paper No
Filter
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- ISBN-10
- ISSN
- EISSN
- Issue
- Journal Volume Number
- References
- Conference Volume Title
- Paper No
Filter
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- ISBN-10
- ISSN
- EISSN
- Issue
- Journal Volume Number
- References
- Conference Volume Title
- Paper No
Filter
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- ISBN-10
- ISSN
- EISSN
- Issue
- Journal Volume Number
- References
- Conference Volume Title
- Paper No
NARROW
Format
Article Type
Subject Area
Topics
Date
Availability
1-2 of 2
Keywords: lithography
Close
Follow your search
Access your saved searches in your account
Would you like to receive an alert when new items match your search?
Sort by
Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Heat Mass Transfer. May 2009, 131(5): 051401.
Published Online: March 20, 2009
.... The microchannel coolers are made by lithography and deep reactive ion etching of single crystal silicon. The test dies contain a dc-operated resistive zone that approximates the spatially averaged heat flux that would appear in low-temperature cofired ceramic microwave circuit packages and in monolithic microwave...
Journal Articles
Publisher: ASME
Article Type: Technical Papers
J. Heat Mass Transfer. June 2004, 126(3): 453–462.
Published Online: June 16, 2004
... evaporation heat pipes LIGA cooling channel flow micromechanical devices gravity lithography electrodeposition Channel Flow Evaporation Heat Transfer Heat Pipes Microscale Evaporative cooling devices such as heat pipes and capillary pumped loops utilize capillary suction to draw...