This paper presents a new adaptive operation strategy that can identify and, in an adaptive fashion, compensate for most fabrication defects and perturbations affecting the behavior of a MEMS z-axis gyroscope. The convergence and resolution analysis presented in the paper shows that the proposed adaptive controlled scheme offers several advantages over conventional modes of operation. These advantages include a larger operational bandwidth, absence of zero-rate output, self-calibration and a large robustness to parameter variations, which are caused by fabrication defects and ambient conditions.

Keywords:
micromechanical devices, gyroscopes, self-adjusting systems, adaptive control, identification, convergence, control system analysis, robust control, stability
Topics:
Adaptive control, Damping, Manufacturing, Microelectromechanical systems, Resolution (Optics), Errors, Dynamics (Mechanics), Resonance, Design, Stability
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