Technical Briefs

Improved Method of CO2 Laser Cutting of Aluminum Nitride

[+] Author and Article Information
Raathai Molian, Pranav Shrotriya

Department of Mechanical Engineering,  Iowa State University, Ames, IA 50011-2161

Pal Molian1

Department of Mechanical Engineering,  Iowa State University, Ames, IA 50011-2161molian@iastate.edu


Corresponding author.

J. Electron. Packag 130(2), 024501 (May 08, 2008) (3 pages) doi:10.1115/1.2912223 History: Received December 02, 2006; Revised September 05, 2007; Published May 08, 2008

The traditional “evaporation∕melt and blow” mechanism of CO2 laser cutting of aluminum nitride (AlN) chip carriers and heat sinks suffers from energy losses due to its high thermal conductivity, formation of dross, decomposition to aluminum, and uncontrolled thermal cracking. In order to overcome these limitations, a thermochemical method that uses a defocused laser beam to melt a thin layer of AlN surface in oxygen environment was utilized. Subsequent solidification of the melt layer generated shrinkage and thermal gradient stresses that, in turn, created a crack along the middle path of laser beam and caused material separation through unstable crack propagation. The benefits associated with thermal stress fracture method over the traditional method are improved cut quality, higher cutting speed, and lower energy losses.

Copyright © 2008 by American Society of Mechanical Engineers
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Grahic Jump Location
Figure 1

Effect of energy density on type of cutting mechanism for 1mm thick AlN

Grahic Jump Location
Figure 2

(a) Top and (b) transverse sectional views of conventional laser-cut AlN (P∕DV=197J∕mm2)

Grahic Jump Location
Figure 3

(a) Top and (b) transverse sectional views of thermal stress fracture mode laser-cut AlN (P∕DV=39J∕mm2)



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