An Experimental and Numerical Study of a Liquid Mixing Device for Microsystems

[+] Author and Article Information
Kazuyoshi Fushinobu

 Department of Mechanical and Control Engineering, Tokyo Institute of Technology, Meguro-ku, Tokyo 152-8552 Japanfushinok@mech.ttiech.ac.jp

Masashi Nakata

 Department of Mechanical and Control Engineering, Tokyo Institute of Technology, Meguro-ku, Tokyo 152-8552 Japan

J. Electron. Packag 127(2), 141-146 (Aug 09, 2004) (6 pages) doi:10.1115/1.1869511 History: Received September 03, 2003; Revised August 09, 2004

A microfluidic mixing device for microsystems with electroosmotic flow (EOF)-driven liquid pumping is proposed and examined experimentally and numerically. Microchannels with SiO2 or Al2O3 wall are fabricated by using surface micromachining technique, and the EOF velocity for each microchannel is measured. A sample device where part of the SiO2 wall is covered with a patterned Al2O3 thin film is fabricated to demonstrate the proposed flow pattern change. Results of numerical calculations suggest mixing enhancement effect.

Copyright © 2005 by American Society of Mechanical Engineers
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Figure 1

Schematic of regular and proposed microchannels driven with EOF: (a) regular microchannel for fluid pumping; (b) proposed fluid pumping microchannel with mixing enhancement

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Figure 2

Fabrication process of microchannel Type I; used for EOF velocity measurement

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Figure 3

Sample fabrication process of a microchannel Type II; fabricated to demonstrate the flow pattern change: (1) SiO2 microchannel, fabricated as shown in Fig. 2; (2) photoresist coating and patterning; (3) Al2O3 film deposition; (4) photoresist removal.

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Figure 4

Top view of the fabricated microchannel Type II

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Figure 5

Experimental appratus for EOF velocity measurement (the microchannels of Type I are used)

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Figure 6

Measured temporal profile of the potential drop along the channel

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Figure 7

Measured EOF velocity for SiO2 and Al2O3 microchannel

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Figure 8

Experimental appratus for flow pattern change visualization

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Figure 9

Top view of the microchannel Type II; tracer trajectories

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Figure 10

Dimensions and the coordinate of the computational domain

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Figure 11

Calculated flow and concentration field

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Figure 12

Calculated concentration profile at the channel outlet



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