Four-Terminal Measurement and Simulations for Sheet Resistance in Piezoresistive Sensing Elements

[+] Author and Article Information
Steven Chen, J. Albert Chiou

Motorola Inc. Deer Park, IL 60010

J. Electron. Packag 125(4), 466-469 (Dec 15, 2003) (4 pages) doi:10.1115/1.1615250 History: Received May 01, 2001; Revised June 01, 2003; Online December 15, 2003
Copyright © 2003 by ASME
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Chiou, J. A., 1999, “Pressure Sensors in Automotive Applications and Future Challenges,” Micro-Electro-Mechanical Systems (MEMS) Symposium, ASME IMECE, MEMS-Vol. 1, pp. 525–530.
Cohen, S. S., and Gildenblat, G. S., eds., 1986, VLSI Electronics Microstructure Science, Academic Press, Vol. 13, Chap. 4.
van der Pauw,  L. J., 1958, Philips Res. Rep., 13, pp. 1–9.
David,  J. M., and Buehler,  M. G., 1977, Solid-State Electron. , 20, pp. 539–543.


Grahic Jump Location
Layout of DPFE sensing element with X-ducer
Grahic Jump Location
Zoomed-in X-ducer layout
Grahic Jump Location
Electrical potential distribution in Case 1: without lateral diffusion
Grahic Jump Location
Electrical field distribution in Case 1: without lateral diffusion



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