Some Modeling Issues on the Finite Element Computation of Thermal Stresses in Metal Lines

[+] Author and Article Information
Arturo O. Cifuentes, Iqbal A. Shareef

IBM T. J. Watson Research Center, P.O. Box 218, Yorktown Heights, NY 10598

J. Electron. Packag 115(4), 392-403 (Dec 01, 1993) (12 pages) doi:10.1115/1.2909348 History: Received November 12, 1992; Revised May 28, 1993; Online April 28, 2008


Thermal stresses are a major concern in the reliability of metal lines. This paper addresses some modeling issues concerning the determination of thermal stresses in such structures. Specifically, a finite element technique that allows one to follow the evolution of the stress field as a function of the steps of the manufacturing process is discussed. In addition, comparisons between several modeling strategies, namely, plane stress versus plane strain, geometric nonlinearity versus geometric linearity, “frozen view” models versus “evolving” models, etc., are presented. A detailed example describing the manufacturing of a copper line is included to illustrate these points.

Copyright © 1993 by The American Society of Mechanical Engineers
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