A summary of recent research in micropositioning and nanopositioning is presented. The work is classified into five groups by actuation approach, including piezoelectric, magnetic, electrostatic, thermal, and electrochemical microactuators. A consistent set of measurable, key characteristics are proposed: degrees of freedom, range, resolution, range-to-resolution ratio, footprint, force, natural frequency, and bandwidth. Values of the key characteristics are listed in tables. The results demonstrate the boundaries of current knowledge and the advantages of each actuation approach. This is the first time this information has been compiled in this growing field and it is summarized in such a way as to be useful to readers. There are 82 references cited in this review article.
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e-mail: culpepper@mit.edu
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November 2006
Review Articles
Actuators for Micropositioners and Nanopositioners
Neal B. Hubbard,
Neal B. Hubbard
L-3 Communications
, Integrated Systems, P.O. Box 154580, MS 1124, Waco, TX 76715
Neal B. Hubbard is a structural engineer with the Integrated Systems Division of L-3 Communications. He received his B.S. degree from Utah State University in 2002 and his M.S. degree from Brigham Young University in 2005. His research has been in the analysis, design, and experimental characterization of novel microelectromechanical systems for nanopositioning.
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Martin L. Culpepper,
Martin L. Culpepper
Department of Mechanical Engineering,
e-mail: culpepper@mit.edu
Massachusetts Institute of Technology
, Cambridge, MA 02139
Martin L. Culpepper is the director of the MIT Precision Compliant Systems Laboratory. Professor Culpepper received his B.S. degree from Iowa State University in 1995 and his M.S. and Ph.D. degrees from the Massachusetts Institute of Technology in 1997 and 2000, respectively. Prior to joining the faculty at MIT, Professor Culpepper was a lecturer at MIT and an engineering consultant for Teradyne Inc. He is the recipient of a NSF CAREER award (2004), a TR100 award (2004), two R&D 100 awards (1999, 2003), a Ruth and Joel Spira Award for Distinguished Teaching (2004), and the Rockwell International Career Development chair at MIT (2004). He is listed on seven patents issued/pending.
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Larry L. Howell
Larry L. Howell
Department of Mechanical Engineering,
e-mail: lhowell@byu.edu
Brigham Young University
, Provo, UT 84602
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Neal B. Hubbard
Neal B. Hubbard is a structural engineer with the Integrated Systems Division of L-3 Communications. He received his B.S. degree from Utah State University in 2002 and his M.S. degree from Brigham Young University in 2005. His research has been in the analysis, design, and experimental characterization of novel microelectromechanical systems for nanopositioning.
L-3 Communications
, Integrated Systems, P.O. Box 154580, MS 1124, Waco, TX 76715
Martin L. Culpepper
Martin L. Culpepper is the director of the MIT Precision Compliant Systems Laboratory. Professor Culpepper received his B.S. degree from Iowa State University in 1995 and his M.S. and Ph.D. degrees from the Massachusetts Institute of Technology in 1997 and 2000, respectively. Prior to joining the faculty at MIT, Professor Culpepper was a lecturer at MIT and an engineering consultant for Teradyne Inc. He is the recipient of a NSF CAREER award (2004), a TR100 award (2004), two R&D 100 awards (1999, 2003), a Ruth and Joel Spira Award for Distinguished Teaching (2004), and the Rockwell International Career Development chair at MIT (2004). He is listed on seven patents issued/pending.
Department of Mechanical Engineering,
Massachusetts Institute of Technology
, Cambridge, MA 02139e-mail: culpepper@mit.edu
Larry L. Howell
Department of Mechanical Engineering,
Brigham Young University
, Provo, UT 84602e-mail: lhowell@byu.edu
Appl. Mech. Rev. Nov 2006, 59(6): 324-334 (11 pages)
Published Online: November 1, 2006
Citation
Hubbard, N. B., Culpepper, M. L., and Howell, L. L. (November 1, 2006). "Actuators for Micropositioners and Nanopositioners." ASME. Appl. Mech. Rev. November 2006; 59(6): 324–334. https://doi.org/10.1115/1.2345371
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