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Keywords: semiconductor device testing
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Journal Articles
Journal:
Journal of Applied Mechanics
Publisher: ASME
Article Type: Technical Papers
J. Appl. Mech. September 2007, 74(5): 996–1005.
Published Online: January 31, 2007
... microactuators cracks compressive strength buckling eddy currents failure analysis semiconductor device testing Obtained from Ref. 4 , Fig. 1 is a scanning electron micrograph of a typical electrothermal actuator, while a line drawing of the same device (absent the guide and the gauge) is contained...
