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Keywords: pull-in phenomena
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Journal Articles
Journal:
Journal of Applied Mechanics
Publisher: ASME
Article Type: Technical Papers
J. Appl. Mech. September 2007, 74(5): 927–934.
Published Online: September 18, 2006
... films MEMS RF-switch electrostatic potential surface forces pull-in phenomena When a thin film clamped at the perimeter is subjected to an external force (e.g., electrostatic potential, long-range intersurface forces), “pull-in” occurs when a tunable surface force reaches a threshold...