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Keywords: electrothermal actuator
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Journal Articles
Journal:
Journal of Applied Mechanics
Publisher: ASME
Article Type: Technical Papers
J. Appl. Mech. September 2007, 74(5): 996–1005.
Published Online: January 31, 2007
... actuator micromechanics failure analysis magnetic forces thermal expansion buckling of beams Electrothermal actuators have been extensively studied as a means of generating rectilinear motion in microelectromechanical systems (MEMS) ( 1 2 ) because of their ability to produce higher output...
