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Keywords: dielectric thin films
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Journal Articles
Journal:
Journal of Applied Mechanics
Publisher: ASME
Article Type: Technical Papers
J. Appl. Mech. September 2007, 74(5): 927–934.
Published Online: September 18, 2006
... spanning a wide range of γ is found such that V 0 * ∝ γ 3 ∕ 2 for γ < 0.5 and V 0 * ∝ γ 5 ∕ 2 for γ > 5 . The new model leads to new design criteria for MEMS-RF-switches. 27 04 2006 18 09 2006 deformation electromechanical effects microswitches microwave switches dielectric thin...
