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Proceedings Papers

Fabrication of Ultra-High Aspect Ratio Array Structures Using Spontaneous Evolution in Multiport Lifted Hele-Shaw Cell

Makrand A. Rakshe, Prasanna S. Gandhi
Proc. ASME. IMECE2023, Volume 3: Advanced Manufacturing, V003T03A094, October 29–November 2, 2023
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2023-113267
https://doi.org/10.1115/IMECE2023-113267
View Paper titled, Fabrication of Ultra-High Aspect Ratio Array Structures Using Spontaneous Evolution in Multiport Lifted Hele-Shaw Cell
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Topics: Biomedicine, Honeycomb structures, Manufacturing, Fluids, Polymer solutions, Drugs, Evaporation, Lithography, Polymers, Separation (Technology)
Proceedings Papers

Development of a Tangential Tactor Using a LIGA/MEMS Linear Microactuator Technology

R. Ghodssi, D. J. Beebe, V. White, D. D. Denton
Proc. ASME. IMECE96, Microelectromechanical Systems (MEMS), 379-386, November 17–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1996-1378
https://doi.org/10.1115/IMECE1996-1378
View Paper titled, Development of a Tangential Tactor Using a LIGA/MEMS Linear Microactuator Technology
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Topics: Microactuators, Microelectromechanical systems, Skin, Design, Electroplating, Lithography, Manganese (Metal), Microfabrication, Microscale devices, Molding
Proceedings Papers

Flow and Heat Transfer Problems in the Semiconductor Manufacturing Processes

Masato Ikegawa
Proc. ASME. IMECE96, Transport Phenomena in Materials Processing and Manufacturing, 183, November 17–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1996-1044
https://doi.org/10.1115/IMECE1996-1044
View Paper titled, Flow and Heat Transfer Problems in the Semiconductor Manufacturing Processes
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Topics: Flow (Dynamics), Heat transfer, Integrated circuit fabrication, Semiconductor wafers, Manufacturing, Particulate matter, Chemical reactions, Chemical vapor deposition, Contamination, Etching
Proceedings Papers

Design, Fabrication and Testing of a Novel Thermally-Actuated Tesla Valve (TATV): A Hybrid Microvalve

Jonghyun Lee, Ashok Thyagarajan, Alaba Bamido, Nandan Shettigar, Debjyoti Banerjee
Proc. ASME. IMECE2022, Volume 9: Mechanics of Solids, Structures, and Fluids; Micro- and Nano-Systems Engineering and Packaging; Safety Engineering, Risk, and Reliability Analysis; Research Posters, V009T13A022, October 30–November 3, 2022
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2022-96265
https://doi.org/10.1115/IMECE2022-96265
View Paper titled, Design, Fabrication and Testing of a Novel Thermally-Actuated Tesla Valve (TATV): A Hybrid Microvalve
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Topics: Design, Lithography, Manufacturing, Testing, Valves
Proceedings Papers

A Large Stroke, Nanometer Precision X-Y Stage for Lithography

Lowell D. Jones, Jeffrey S. N. Paine
Proc. ASME. IMECE98, Adaptive Structures and Material Systems, 89-94, November 15–20, 1998
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1998-0942
https://doi.org/10.1115/IMECE1998-0942
View Paper titled, A Large Stroke, Nanometer Precision X-Y Stage for Lithography
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Topics: Lithography, Design, Heat, Actuators, Cables, Flexure mechanisms, Inertia (Mechanics), Innovation, Magnetic levitation, Microelectronic devices
Proceedings Papers

Drag Reduction on Microscale Concave-Convex Surface

Masato Hasegawa, Hideki Nariai, Kazufumi Kaneko, Hiroshi Maki, Akira Yabe, Sohei Matsumoto
Proc. ASME. IMECE99, Heat Transfer: Volume 1, 317-322, November 14–19, 1999
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1999-0999
https://doi.org/10.1115/IMECE1999-0999
View Paper titled, Drag Reduction on Microscale Concave-Convex Surface
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Topics: Drag reduction, Microscale devices, Filters, Friction, Reactive-ion etching, Reynolds number, Bubbles, Coating processes, Coatings, Drops
Proceedings Papers

Fabrication of High-Index Refractive Microlenses for Near-Field Optics

D. A. Fletcher, K. B. Crozier, G. S. Kino, C. F. Quate, K. E. Goodson
Proc. ASME. IMECE99, Micro-Electro-Mechanical Systems (MEMS), 289-294, November 14–19, 1999
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1999-0282
https://doi.org/10.1115/IMECE1999-0282
View Paper titled, Fabrication of High-Index Refractive Microlenses for Near-Field Optics
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Topics: Manufacturing, Optics, Resolution (Optics), Lenses (Optics), Silicon, Diffraction, Refractive index, Spectroscopy, Temperature measurement, Wavelength
Proceedings Papers

Process Modeling of Projection Micro Stereo Lithography for Three-Dimensional MEMS

Cheng Sun, Nicholas Fang, Xiang Zhang
Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 813-818, November 11–16, 2001
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2001/MEMS-23916
https://doi.org/10.1115/IMECE2001/MEMS-23916
View Paper titled, Process Modeling of Projection Micro Stereo Lithography for Three-Dimensional MEMS
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Topics: Lithography, Microelectromechanical systems, Modeling, Manufacturing, Chemical properties, Hardening (Curing), Resins, Resolution (Optics), Springs, Ultraviolet radiation
Proceedings Papers

Deep Reactive Ion Etched Submicron Beam/Trench Characterization

Gary O’Brien, Xing Cheng, L. J. Guo
Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 427-431, November 11–16, 2001
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2001/MEMS-23863
https://doi.org/10.1115/IMECE2001/MEMS-23863
View Paper titled, Deep Reactive Ion Etched Submicron Beam/Trench Characterization
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Topics: Chemistry, Cycles, Etching, Lithography, Microelectromechanical systems, Plasmas (Ionized gases), Reactive-ion etching, Semiconductor wafers, Silicon
Proceedings Papers

Creation of Nanometer-Sized Features in Polysilicon Using Fusing

Jeremy A. Levitan, Dan Good, Michael J. Sinclair, Joseph M. Jacobson
Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 397-402, November 11–16, 2001
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2001/MEMS-23858
https://doi.org/10.1115/IMECE2001/MEMS-23858
View Paper titled, Creation of Nanometer-Sized Features in Polysilicon Using Fusing
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Topics: Microelectromechanical systems, Polysilicon, Microfabrication, Manufacturing, Resolution (Optics), Dimensions, Electrons, Lithography, Melting, Semiconductors (Materials)
Proceedings Papers

Design and Analysis of a Miniature Rotary Wankel Compressor

G. W. Finger, J. S. Kapat, L. C. Chow
Proc. ASME. IMECE2001, Advanced Energy Systems, 309-316, November 11–16, 2001
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2001/AES-23637
https://doi.org/10.1115/IMECE2001/AES-23637
View Paper titled, Design and Analysis of a Miniature Rotary Wankel Compressor
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Topics: Compressors, Design, Rotors, Energy / power systems, Gates (Closures), Lithography, Electrical discharge machining, Pressure, Stress, Brayton cycle
Proceedings Papers

Smart Structures Technology As Part of Integrated Tool Management in Lithography Scanners

Betsy Marsh, Baruch Pletner, Huck Dorn
Proc. ASME. IMECE2001, Adaptive Structures and Material Systems, 1-8, November 11–16, 2001
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2001/AD-23700
https://doi.org/10.1115/IMECE2001/AD-23700
View Paper titled, Smart Structures Technology As Part of Integrated Tool Management in Lithography Scanners
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Topics: Lithography, Smart structures, Actuators, Structural elements (Construction), Trajectories (Physics), Vibration, Control systems, Metrology, Chain, Dampers
Proceedings Papers

Design and Analysis of a Miniature Rotary Wankel Compressor

G. W. Finger, J. S. Kapat, L. C. Chow
Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 881-888, November 11–16, 2001
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2001/MEMS-23926
https://doi.org/10.1115/IMECE2001/MEMS-23926
View Paper titled, Design and Analysis of a Miniature Rotary Wankel Compressor
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Topics: Compressors, Design, Microelectromechanical systems, Rotors, Energy / power systems, Gates (Closures), Lithography, Electrical discharge machining, Pressure, Stress
Proceedings Papers

Heat Transfer Implications in the First MEMS Fabricated Thermal Transpiration-Driven Vacuum Pump for Gases

Stephen E. Vargo, Amanda A. Green, E. P. Muntz
Proc. ASME. IMECE2000, Heat Transfer: Volume 2, 307-314, November 5–10, 2000
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2000-1440
https://doi.org/10.1115/IMECE2000-1440
View Paper titled, Heat Transfer Implications in the First MEMS Fabricated Thermal Transpiration-Driven Vacuum Pump for Gases
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Topics: Gases, Heat transfer, Microelectromechanical systems, Transpiration, Vacuum pumps, Compressors, Instrumentation, Contamination, Engineering simulation, Flow (Dynamics)
Proceedings Papers

Three-Dimensional Printing of Carbon Nanostructures

Alex Resnick, Jungkyu Park, Biya Haile, Eduardo B. Farfán
Proc. ASME. IMECE2019, Volume 12: Advanced Materials: Design, Processing, Characterization, and Applications, V012T10A027, November 11–14, 2019
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2019-11411
https://doi.org/10.1115/IMECE2019-11411
View Paper titled, Three-Dimensional Printing of Carbon Nanostructures
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Topics: Additive manufacturing, Carbon, Nanostructures , Graphene, Chemical vapor deposition, Thermal properties, Carbon nanotubes, Cutting, Degrees of freedom, Flexible electronics
Proceedings Papers

Demonstrating the Potential of a Hybrid Model to Increase the 360 Degrees Rotational Motion Freedom of Ironless Permanent Magnet Planar Motors

Ding Yuan, Ming Zhang, Yu Zhu, Xin Li, Leijie Wang
Proc. ASME. IMECE2018, Volume 10: Micro- and Nano-Systems Engineering and Packaging, V010T13A007, November 9–15, 2018
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2018-87007
https://doi.org/10.1115/IMECE2018-87007
View Paper titled, Demonstrating the Potential of a Hybrid Model to Increase the 360 Degrees Rotational Motion Freedom of Ironless Permanent Magnet Planar Motors
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Topics: Motors, Permanent magnets, Rotation, Engineering simulation, Lithography, Machinery, Simulation
Proceedings Papers

Photosensitivity of Monolayer Graphene-Base Field Effect Transistor

Jowesh Avisheik Goundar, Ken Suzuki, Hideo Miura
Proc. ASME. IMECE2018, Volume 10: Micro- and Nano-Systems Engineering and Packaging, V010T13A013, November 9–15, 2018
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2018-87245
https://doi.org/10.1115/IMECE2018-87245
View Paper titled, Photosensitivity of Monolayer Graphene-Base Field Effect Transistor
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Topics: Graphene, Transistors, Temperature, Chemical vapor deposition, Silicon, Brightness (Photometry), Cathode ray oscilloscopes, Copper foil, Electrodes, Electron beams
Proceedings Papers

Transition From Planar Stratified Flow in Converging Microchannels

Zachary Lamberty, Minseo Park, Nelson Macken, Adam T. Melvin
Proc. ASME. IMECE2018, Volume 7: Fluids Engineering, V007T09A058, November 9–15, 2018
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2018-86289
https://doi.org/10.1115/IMECE2018-86289
View Paper titled, Transition From Planar Stratified Flow in Converging Microchannels
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Topics: Microchannels, Stratified flow, Flow (Dynamics), Reynolds number, Fluids, Junctions, Dimensions, Microfluidics, Bonding, Flow visualization
Proceedings Papers

Dynamic Exposure Model of Scanning Beam Interference Lithography

Sen Lu, Kaiming Yang, Yu Zhu, Leijie Wang, Ming Zhang
Proc. ASME. IMECE2018, Volume 4A: Dynamics, Vibration, and Control, V04AT06A004, November 9–15, 2018
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2018-86979
https://doi.org/10.1115/IMECE2018-86979
View Paper titled, Dynamic Exposure Model of Scanning Beam Interference Lithography
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Topics: Lithography, Photoresists, Diffraction gratings, Process simulation
Proceedings Papers

Real-Time Correction of Nonlinearity Error in Homodyne Phase-Locking Interferometer

S. Lu, K. M. Yang, Y. Zhu, L. J. Wang, M. Zhang
Proc. ASME. IMECE2017, Volume 2: Advanced Manufacturing, V002T02A096, November 3–9, 2017
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2017-70914
https://doi.org/10.1115/IMECE2017-70914
View Paper titled, Real-Time Correction of Nonlinearity Error in Homodyne Phase-Locking Interferometer
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Topics: Errors, Interferometers, Nanoscale phenomena, Accuracy and precision, Algorithms, Diffraction gratings, Kalman filters, Lithography, Polarization (Electricity), Polarization (Light)