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Research Papers

Three-Dimensional Measurements of Photo-curing Process With Photo-curable Resin for UV-Nanoimprint by Micro-digital-Holographic-PTV

[+] Author and Article Information
Shin-ichi Satake, Gaku Sorimachi, Takahiro Kanai, Jun Taniguchi, Noriyuki Unno

Department of Applied Electronics, Tokyo University of Science, 2641 Yamazaki, Noda, Chiba 278-8510, Japan

J. Electron. Packag. 132(3), 031003 (Sep 09, 2010) (5 pages) doi:10.1115/1.4001854 History: Received November 13, 2009; Revised April 24, 2010; Published September 09, 2010

A high time-resolution measurement of flow field in a glass plate with glass cover with two holes was done by a micro-DHPTV system. The two holes mentioned here were also inside the photo-curable resin. Particle measurement was carried out during a 2 s time period that covered the time it took for the curing of resin. This curing time was theoretically calculated from the irradiation flux of the Ultraviolet (UV) source employed in the experiment. Moreover, temperature dependence of photo-curable resin was evaluated by measuring the resin at changing temperatures. Consequently, the tracking of seeding particles could instantaneously be recorded. The 3-D displacements, obtained from the particles being tracked, took place primarily along the direction of the depth. These values were found to be in good agreement with the theoretically calculated displacement values obtained from UV irradiation flux. Moreover, the displacement during photo-curing appeared to be proportional to the increase in temperature.

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Copyright © 2010 by American Society of Mechanical Engineers
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Figures

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Figure 1

Optical setup for micro-channel

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Figure 2

Timing chart for base camera signal and AOM

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Figure 3

Hologram images of particles enclosed inside the glass covers with photocurable resin at 26.3°C

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Figure 4

Hologram images of particles enclosed inside the glass covers with photo-curable resin at 37.2°C

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Figure 5

Hologram images of particles enclosed inside the glass covers with photo-curable resin at 48.1°C

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Figure 6

3D image of particle distribution on glass plate with photo-curable resin at 26.3°C

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Figure 7

3D image of particle distribution on glass plate with photo-curable resin at 37.2°C

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Figure 8

3-D image of particle distribution on glass plate with photo-curable resin at 48.1°C

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Figure 9

Displacement from an initial frame to a current frame in x-direction

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Figure 10

Displacement from an initial frame to a current frame in y-direction

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Figure 11

Displacement from an initial frame to a current frame in z-direction

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Figure 12

3-D movement L in the direction of the depth

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Figure 13

Hologram image for a micro-channel with two holes

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Figure 14

3-D image of particle distribution in a micro-channel with two holes

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