Lifetime Estimation of Moems Devices

[+] Author and Article Information
T. Bar-Kohany

Mechanical Engineering Department,  Ben-Gurion University of the Negev, Beer-Sheva 84105, Israelkahany@bgumail.bgu.ac.il

A. Stern

Materials Engineering Department,  Ben-Gurion University of the Negev, Beer-Sheva, Israel

J. Electron. Packag 129(2), 144-148 (Jun 13, 2006) (5 pages) doi:10.1115/1.2721085 History: Received August 16, 2005; Revised June 13, 2006

Generally, microelectro mechanical systems (MOEMS) devices require encapsulation for protecting their fragile and tiny inner components in a hermetically sealed cavity. Cavity hermeticity can be critical to the device performance and plays a vital role with respect to reliability and long-term drift characteristics of the MOEMS products. The paper presents a theoretical approach for estimation of lifetime of MOEMS devices in terms of cavity’s hermeticity to gases and water. The results are summarized as working maps for MOEMS packaging engineers, in terms of device cavity (internal package volume), equivalent leak rates, and equivalent size of interconnected defects in the bonding zone.

Copyright © 2007 by American Society of Mechanical Engineers
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Figure 1

He pressure inside the package versus cavity volume after: (a) 1year, and (b) 10years

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Figure 2

Lifetime versus cavity volume at different leak rates and final pressures: (a) pf=10−1Torr; and (b) pf=10−3Torr

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Figure 3

Conductance versus effective radius of the tube at different lengths

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Figure 4

Conductance versus length of tube at different effective radiuses

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Figure 5

ppm of water versus cavity volume at different leak rates after 1year

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Figure 6

Lifetime versus cavity volume at different leak rates with 5000ppm of water




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