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TECHNICAL BRIEFS

Influence of the Fluid on the Experimental Performances of Triangular Silicon Microheat Pipes

[+] Author and Article Information
Guillaume Pandraud

 Centre de Thermique de Lyon, UMR 5008, INSA, 20 av. A. Einstein, 69621 Villeurbanne cedex, France

Martine Le Berre

 Laboratoire de Physique de la Matière, UMR 5511, INSA, 20 av. A. Einstein, 69621 Villeurbanne cedex, France

Panagiota Morfouli

 Institut de Microélectronique, Electromagnétisme et Photonique, UMR 5130, 23 av. des Martyrs, Bíte Postale 257, 38016 Grenoble Cedex 1, France

Monique Lallemand1

 Centre de Thermique de Lyon, UMR 5008, INSA, 20 av. A. Einstein, 69621 Villeurbanne cedex, Francemonique.lallemand@insa-lyon.fr

1

Corresponding author.

J. Electron. Packag 128(3), 294-296 (Oct 11, 2005) (3 pages) doi:10.1115/1.2229233 History: Received October 11, 2004; Revised October 11, 2005

An experimental study was conducted to determine the performances of silicon microheat pipes (MHPs) filled with different fluids. The MHP arrays are made of 27 triangular microchannels chemically etched in a silicon wafer. This wafer is closed by molecular bonding of a bulk oxidized silicon wafer. The results show that the use of MHPs with low liquid charges can increase the effective thermal conductivity of the array. The best improvement of the effective thermal conductivity of the MHP array is equal to 41% for methanol and pentane, 12% for ethanol and nil for water and FC72.

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Copyright © 2006 by American Society of Mechanical Engineers
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Figures

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Figure 1

Schematic of the MHP array: (a) longitudinal section; (b) cross-section

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Figure 2

Comparison between experimental (points) and predicted (lines) temperature differences (T−Tx=30mm) for different fill ratios with methanol (Q=3W, Theatsink=30°C)

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Figure 3

MHP array effective thermal conductivity as a function of the liquid fill ratio for methanol, ethanol, and pentane

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