0
RESEARCH PAPERS

An Experimental and Numerical Study of a Liquid Mixing Device for Microsystems

[+] Author and Article Information
Kazuyoshi Fushinobu

 Department of Mechanical and Control Engineering, Tokyo Institute of Technology, Meguro-ku, Tokyo 152-8552 Japanfushinok@mech.ttiech.ac.jp

Masashi Nakata

 Department of Mechanical and Control Engineering, Tokyo Institute of Technology, Meguro-ku, Tokyo 152-8552 Japan

J. Electron. Packag 127(2), 141-146 (Aug 09, 2004) (6 pages) doi:10.1115/1.1869511 History: Received September 03, 2003; Revised August 09, 2004

A microfluidic mixing device for microsystems with electroosmotic flow (EOF)-driven liquid pumping is proposed and examined experimentally and numerically. Microchannels with SiO2 or Al2O3 wall are fabricated by using surface micromachining technique, and the EOF velocity for each microchannel is measured. A sample device where part of the SiO2 wall is covered with a patterned Al2O3 thin film is fabricated to demonstrate the proposed flow pattern change. Results of numerical calculations suggest mixing enhancement effect.

FIGURES IN THIS ARTICLE
<>
Copyright © 2005 by American Society of Mechanical Engineers
Your Session has timed out. Please sign back in to continue.

References

Figures

Grahic Jump Location
Figure 1

Schematic of regular and proposed microchannels driven with EOF: (a) regular microchannel for fluid pumping; (b) proposed fluid pumping microchannel with mixing enhancement

Grahic Jump Location
Figure 2

Fabrication process of microchannel Type I; used for EOF velocity measurement

Grahic Jump Location
Figure 3

Sample fabrication process of a microchannel Type II; fabricated to demonstrate the flow pattern change: (1) SiO2 microchannel, fabricated as shown in Fig. 2; (2) photoresist coating and patterning; (3) Al2O3 film deposition; (4) photoresist removal.

Grahic Jump Location
Figure 4

Top view of the fabricated microchannel Type II

Grahic Jump Location
Figure 5

Experimental appratus for EOF velocity measurement (the microchannels of Type I are used)

Grahic Jump Location
Figure 6

Measured temporal profile of the potential drop along the channel

Grahic Jump Location
Figure 7

Measured EOF velocity for SiO2 and Al2O3 microchannel

Grahic Jump Location
Figure 8

Experimental appratus for flow pattern change visualization

Grahic Jump Location
Figure 9

Top view of the microchannel Type II; tracer trajectories

Grahic Jump Location
Figure 10

Dimensions and the coordinate of the computational domain

Grahic Jump Location
Figure 11

Calculated flow and concentration field

Grahic Jump Location
Figure 12

Calculated concentration profile at the channel outlet

Tables

Errata

Discussions

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related Journal Articles
Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In