Modeling the Thermal Actuation in a Thermo-Pneumatic Micropump

[+] Author and Article Information
M. Carmona, S. Marco, J. Samitier

Sistemes d’Instrumentació i Communicació (SIC), Departament d’Electrònica, Facultat de Fı́sica, Universitat de Barcelona, C/Martı́ i Franquès 1, 08028 Barcelona, Spain

M. C. Acero, J. A. Plaza, J. Esteve

Centre Nacional de Microelectrònica, Campus UAB, 08193-Bellaterra, Spain

J. Electron. Packag 125(4), 527-530 (Dec 15, 2003) (4 pages) doi:10.1115/1.1604154 History: Received November 01, 2002; Online December 15, 2003
Copyright © 2003 by ASME
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Schematic section of the thermo-pneumatic actuated micropump
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Schematic lumped representation of the fluidic model of the micropump. Capacitance represents the deformable membrane and the valves are modeled as nonlinear resistances.
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Displacement (in cm) of the membrane obtained by coupled thermo-mechanical simulation of a thermo-pneumatic actuation unit (power=180 mW)
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Comparison between the experimental mean temperature over the electrical resistance and the temperature obtained by FEM simulations
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Dynamic maximum membrane displacement obtained from thermal simulations with a power of 0.28 W
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Comparison of the dynamic response of the maximum membrane displacement for the lower time constant
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Comparison between simulation and experimental results of the dynamic maximum membrane displacement with the addition of a thermal resistance




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