0
TECHNICAL PAPERS

Humidity-Induced Voltage Shift on MEMS Pressure Sensors

[+] Author and Article Information
J. Albert Chiou, Steven Chen, Jinbao Jiao

Motorola Inc., Deer Park, IL 60010

J. Electron. Packag 125(4), 470-474 (Dec 15, 2003) (5 pages) doi:10.1115/1.1615249 History: Received May 01, 2001; Revised June 01, 2003; Online December 15, 2003
Copyright © 2003 by ASME
Your Session has timed out. Please sign back in to continue.

References

Isenberg, C., 1992, The Science of Soap Films and Soap Bubbles, NY, Dover Publications, Inc., pp. 107–122.
Parikh,  A. N., Allara,  D. L., Azouz,  I. B., and Rondelez,  F., 1994, “An Intrinsic Relationship between Molecular Structure in Self-Assembled n-Alkylsiloxane Monolayers and Deposition Temperature,” J. Phys. Chem., 98, pp. 7577–7590.
Harper, P., 1998, “Relationship of Anodic Bond Strength and Humidity Shift,” Motorola Internal Report, pp. 1–7.

Figures

Grahic Jump Location
MAP sensor and inside sensing element
Grahic Jump Location
Cross section of sensing element packaging
Grahic Jump Location
Humidity screen of good parts
Grahic Jump Location
Humidity screen of bad parts
Grahic Jump Location
MAP sensor sensing element
Grahic Jump Location
Liquid drop under surface tension between two adjacent plates
Grahic Jump Location
Backside view of sensing element with hypothetical cracks
Grahic Jump Location
Finite element model of sensing element packaging
Grahic Jump Location
Stresses parallel to diaphragm edge, Sxx (Mpa)
Grahic Jump Location
Stresses perpendicular to diaphragm edge, Syy (Mpa)
Grahic Jump Location
Complete separation results from cleave test of a humidity failure
Grahic Jump Location
No interface separation from cleave test of a part which survived the humidity test

Tables

Errata

Discussions

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related Journal Articles
Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In