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ADDITIONAL TECHNICAL PAPERS

Study of Mechanical Behavior of Compliant Micro-Springs for Next Generation Probing Applications

[+] Author and Article Information
Mudasir Ahmad, Suresh K. Sitaraman

Computer-Aided Simulation of Packaging Reliability (CASPaR) Laboratory, The George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, Atlanta, GA 30332-0405

J. Electron. Packag 124(4), 411-418 (Dec 12, 2002) (8 pages) doi:10.1115/1.1512296 History: Received December 03, 2001; Online December 12, 2002
Copyright © 2002 by ASME
Topics: Stress , Springs , Force , Bonding
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References

Figures

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Schematic of micro-spring for probing 3
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Finite element model of a spring, a substrate, and a bonding pad
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Finite element model illustrating boundary conditions
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Variation of vertical probing force with compression for springs with different lift heights
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Variation of vertical probing force with compression for springs with different taper angles
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Variation of vertical probing force with sliding distance for springs with different taper angles
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Typical scrub mark obtained from finite element models (pad dimensions 70×20 μm)
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Focused ion beam image of the experimental scrub mark. The scrub length measured was ∼47 μm, that from FEA revealed 50.355 μm.
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Elastic and plastic strains versus compression for springs with different taper angles from FEA
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Penetration depth versus compression for springs with different taper angles from FEA
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(a) A Q-slice of the penetration depth, showing the variation along the pad; (b) cross section of the pad, showing the deformation formed by the pointed spring tip; (c) sectional view, showing a clearer view of the penetration depth along the pad
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(a) Shape of indenting volume of contact, (b) shape of indenting volume of contact
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Tip angle versus indentation depth obtained analytically and from FEM
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Focused ion beam images of the cross section of a typical probe mark—(a) low resolution; (b) high resolution. The indentation depth was measured to be about 0.25 μm.
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Warpage of a spring tip with a 45-deg taper angle
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Variation of tip stress with compression for springs with different taper angles
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Variation of spring base stress with compression for springs with different taper angles
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Probing force versus constriction resistance

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