Evaluation and Improvement of the Adhesive Fracture Toughness of CVD Diamond on Silicon Substrate

[+] Author and Article Information
Shoji Kamiya, Hironori Takahashi, Masumi Saka

Tohoku University, Department of Mechanical Engineering, Aramaki aza Aoba 01, Aoba-ku, Sendai 980-8579, Japan

Hiroyuki Abé

Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan

J. Electron. Packag 124(3), 271-276 (Jul 26, 2002) (6 pages) doi:10.1115/1.1481374 History: Received August 20, 1999; Revised July 23, 2001; Online July 26, 2002
Copyright © 2002 by ASME
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SEM micrograph of diamond particles on silicon substrate
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Raman spectrum of diamond particle
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Schematic illustration of the experimental setup
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Composition of diamond particles, (a) silicon (100) substrates; (b) silicon (111) substrates
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Variations of the adhesive fracture toughness
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Influence of the graphite content on the adhesive fracture toughness
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Interface fracture morphologies of diamond particles, (a) 0.5% CH4; (b) 2.0% CH4; (c) 5.0% CH4
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EDX analysis for the adhesive fracture surface of diamond particles, (a) 0.5% CH4; (b) 2.0% CH4; (c) 5.0% CH4
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Cross-sectional SEM observations of diamond particles on Si substrate, (a) 1.5% CH4; (b) 5.0% CH4
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TEM observations of cross sections, (a) 0.5% CH4; (b) 2.0% CH4; (c) 5.0% CH4




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