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TECHNICAL PAPERS

Birefringence Reducing Precision Replication Process Assisted by Infrared Radiation

[+] Author and Article Information
Kimitoshi Sato, Yasuo Kurosaki

Department of Mechanical Engineering and Intelligent Systems, University of Electro-Communications, Chofu, Tokyo 182-8585, Japan

J. Electron. Packag 124(2), 111-114 (May 02, 2002) (4 pages) doi:10.1115/1.1451846 History: Received April 20, 2001; Online May 02, 2002
Copyright © 2002 by ASME
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References

Figures

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Birefringence distribution in the transverse direction
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Influence of duration of irradiation on replication using the mother stamper
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AFM images of stamper and work piece
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Optical system for the photo-elastic observation
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Detail of precise mold system used in the replication process
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Experimental setup for the precise replication process
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Schematic of the geometry of work piece
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Numerically calculated temperature distributuin in the mold system
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A model of the numerical simulation
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Schematic of the two-stage transcription process assited by infrared radiation
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Birefringence patterns in processed discs

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