A Reexamination of Residual Stresses in Thin Films and of the Validity of Stoney’s Estimate

[+] Author and Article Information
C. Y. Hui, H. D. Conway, Y. Y. Lin

Department of Theoretical and Applied Mechanics, Cornell University, Ithaca, NY 14853

J. Electron. Packag 122(3), 267-273 (Sep 01, 2000) (7 pages) doi:10.1115/1.1287930 History:
Copyright © 2000 by ASME
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Grahic Jump Location
Geometry of two-layer system
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Schematic of internal stresses in composite
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Schematic of final stress state as superposition of two stress states
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Polar coordinate system for the analysis of local stress state near the edge
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Shear and normal stresses at ends of composite. These stresses are statically equivalent to the force F and moment M.
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Free body diagram of film and substrate
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(a) Comparison of film stresses (40) with those obtained from Stoney formula (14b). ω=Ef/Es and δ=hf/hs. (b) Comparison of film stresses (13b) with those obtained from Stoney formula (14b). ω=Ef/Es and δ=hf/hs.
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Elastic-plastic behavior of film material
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Schematic of energy release rate calculation
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Propagation of interface crack into substrate




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