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TECHNICAL PAPERS

Flow Analysis in a Chip Cavity During Semiconductor Encapsulation

[+] Author and Article Information
S. Han, K. K. Wang

Sibley School of Mechanical and Aerospace Engineering, Cornell University, B60 Rhodes Hall, Ithaca, New York 14853

J. Electron. Packag 122(2), 160-167 (Jan 11, 1999) (8 pages) doi:10.1115/1.483149 History: Received November 05, 1997; Revised January 11, 1999
Copyright © 2000 by ASME
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References

Figures

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(a) Schematic diagram of flow in a thin cavity. Ce refers to entrance into cavity, Cm to the advancing melt front, Ci to possible inserts in the mold, and Co to the outer boundary of cavity and (b) coordinate in the thickness direction. The cavity is thin in the z-direction with a gap thickness of 2h. Here z=0 corresponds to the mold wall and z=2h corresponds to the leadframe.
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A geometry for the flow through a leadframe opening (2b1 corresponds to leadframe opening size)
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Extra pressure drop coefficient (KX) versus Z(z/b1) In the developing-flow region of a parallel plate for a power-law fluid with n=0.74
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(a) Experimental setup used for the visualization of flow in a cavity with leadframe and (b) leadframe used in the experiment
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Side-view of a rectangular cavity with a leadframe in the middle. Fluid is fed at cavity 1 and some fluid flow through leadframe to cavity 2.
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Measured and calculated distance between two melt-fronts at cavity 1 and 2 for silicone oil
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Viscosity versus shear rate of silicone oil (Dow-Corning 200) at 22°C used in the experiment
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Calculation of b0 and b1 for the leadframe
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Finite-element mesh used in the calculation for the silicone-oil case
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(a) Distance between melt fronts at cavity 1 and cavity 2 for silicone oil and (b) pressure at two nodal points in the entrance region (P1: Node at cavity 1; P2: node at cavity 2). Cross-flow rate from cavity 1 to cavity 2 for silicone oil.
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(a) Openings in the leadframe for the leadframe used in this experiment, and (b) one example of cavity modeling with some of the cross-flow elements
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Modeling of thickness in the chip cavity (arrows represent the cavity thickness to be used in the simulation at each region)
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Finite-element mesh used for the simulation in the epoxy-molding compound case
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Melt-front shapes obtained from experiment (a) and from simulation (b) after 2.0 seconds of filling
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Melt-front shapes obtained from experiment (a) and from simulation (b) after 2.8 seconds of filling

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