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TECHNICAL PAPERS

Measurement of Dynamic Warpage During Thermal Cycling of Dielectric Coated SS Substrates for Large Area MCM-D Packaging

[+] Author and Article Information
Anh X. H. Dang, I. Charles Ume

School of Mechanical Engineering, Georgia Institute of Technology, 813 Ferst Drive, Atlanta, GA 30332

Swapan K. Bhattacharya

Packaging Research Center, Georgia Institute of Technology, 813 Ferst Drive, Atlanta, GA 30332

J. Electron. Packag 122(2), 77-85 (Nov 22, 1999) (9 pages) doi:10.1115/1.483138 History: Received April 09, 1999; Revised November 22, 1999
Copyright © 2000 by ASME
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References

Figures

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SS Sample 1, relative warpage of Day 1—Data Pt. #4 (at 90°C) from initial room temperature measurement: (a) Moiré phased image; (b) point values; (c) three-dimensional surface plot
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SS Sample 1, relative warpage of Day 1—Data Pt. #5 (at room temperature) from initial room temperature measurement: (a) Moiré phased image; (b) point values; (c) three-dimensional surface plot
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SS Sample 1, relative warpage of Day 4—Data Pt. #1 (at room temperature) from initial room temperature measurement: (a) Moiré phased image; (b) point values; (c) three-dimensional surface plot
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SS Sample 1, relative warpage of Day 4—Data Pt. #2 (at 160°C) from initial room temperature measurement: (a) Moiré phased image; (b) point values; (c) three-dimensional surface plot
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SS Sample 1, relative warpage of Day 4—Data Pt. #3 (at room temperature) from initial room temperature measurement: (a) Moiré phased image; (b) point values; (c) three-dimensional surface plot
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SS Sample 1, relative warpage of Day 1—Data Pt. #3 (at room temperature) from initial room temperature measurement: (a) Moiré phased image; (b) point values; (c) three-dimensional surface plot
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SS Sample 1, relative warpage of Day 1—Data Pt. #2 (at 160°C) from initial room temperature measurement: (a) Moiré phased image; (b) point values; (c) three-dimensional surface plot
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SS Sample 1, Day 1—Data Pt. #1 (at room temperature): (a) Moiré phased image; (b) point values; (c) three-dimensional surface plot
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Simulated infrared reflow on-line measurement system
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Schematic of shadow Moiré setup
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Cross-section of a filled 0.01 in. via
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SEM of a representative CB-100 conductive paste filled 0.01 in. via
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Laser drilled 0.01 inch via array in a Parylene N coated coated SS, 50X
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SS Sample 1, relative warpage of Day 4—Data Pt. #4 (at 90°C) from initial room temperature measurement: (a) Moiré phased image; (b) point values; (c) three-dimensional surface plot
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SS Sample 1, relative warpage of Day 4—Data Pt. #5 (at room temperature) from initial room temperature measurement: (a) Moiré phased image; (b) point values; (c) three-dimensional surface plot

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