Fatigue of Microlithographically-Patterned Free-Standing Aluminum Thin Film Under Axial Stresses

[+] Author and Article Information
David T. Read

Materials Reliability Division, National Institute of Standards and Technology, Boulder, CO 80303

James W. Dally

Mechanical Engineering Department, University of Maryland, College Park, MD 20742

J. Electron. Packag 117(1), 1-6 (Mar 01, 1995) (6 pages) doi:10.1115/1.2792062 History: Received August 11, 1992; Revised December 20, 1994; Online November 06, 2007


Fatigue life as a function of number of stress cycles has been determined for three-layer titanium-aluminum-titanium thin-film specimens. For nominal stresses ranging from 50 to 90 percent of the upper-bound ultimate strength, the fatigue lives ranged up to 76 cycles. In all specimens, active cracks were observed after only a few stress cycles. These cracks grew with repeated cycling. The fatigue life was reached when the specimen could no longer sustain the maximum cyclic stress.

Copyright © 1995 by The American Society of Mechanical Engineers
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